Four-Terminal RF Phase Change Switches: Design, Optimization and Fabrication
2018-12-11T20:17:56Z (GMT) by
The programmability of the optical and electrical characteristics of chalcogenide PC materials using joule heating makes them useful for data storage and memory applications. This work explored the use of PC materials in RF switches. A 4-terminal RF PC switch that used a separate tungsten microheater<br>to program the PC material was designed, optimized, fabricated and integrated with an RF CMOS<br>circuit.